3 publication(s) trouvée(s)
Article scientifique
A two-port electrothermal model for suspended MEMS device structures with multiple inputs
Abstract. Advances in micromachining have led to the development of microelectromechanical systems (MEMS) devices with suspended structures used in a …
Article scientifique
Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors
Abstract. The asymmetric resonance response in thermally actuated piezoresistive cantilever sensors causes a need for optimization, taking parasitic actuation–sensing effects …
Article scientifique
Magnetic-field CMOS microsensor for low-energy electric discharge detection
Abstract. This paper addresses the development and characterization of a non-intrusive silicon-based microsensor, which can detect electric partial discharges in …