Chemical Assisted Laser Beam Machining of SiC Ceramic and Optimization of Process Parameters

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Abstract Chemo mechanical laser beam assisted finishing is the process of a conceptual combination of a fundamental cognitive process. In this process, three basic concepts are synthesized to obtain a smooth surface of silicon carbide. Three different chemicals of H2SO4 , HCl, and HF with a 50% solution with purified water were used. Continuous mode CO2 power from 250W-300W was used to melt the surface after acid was applied. The smooth surface was evaluated using morphology, including pore pattern, pore depth, and pore width was studied under a scanning electron microscope, and the surface roughness, wear-resistance, and hardness were analyzed using a non-contact surface profilometer, scratch tester TR-101, and Digital Rockwell hardness device respectively. The results were statistically analyzed using Design expert software analysis of variance (ANOVA). The results showed a significant change in the pore pattern, crystal structure, surface roughness, wear-resistance, and hardness. This result was verified by scanning electron microscope, optical microscope, Non-contact profilometer, and scratch tester TR-101machine. The hardness of the smooth surface was increased as well as surface roughness and the coefficient of friction also improved as compared to substrate silicon carbide.

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